欢迎光临阿托瓦克有限公司。

我公司成立于1997年10月，以开发半导体生产过程中的气体和真空控制系统，测量为主要组件。

我们正在大力发展智能元件，包括MFC、MFC控制器、对流计及控制器、离子计及控制器、电容压力表、节流阀控制器等。

我们ATOVAC将在未来和现在保持我们可靠和受人尊敬的公司的地位。请给我们更多的鼓励和建议。我们总是愿意听取客户的意见。

MPG1000 Mini Pressure Gague

MPG Series are part of the Atovac family of general purpose pressure gauge designed 

to provide accurate reliable, and repeatable Pressure measurements in the range 

from 1 Torr to 0.001 Torr.

Features & Benefits

■ Smaller, saving space

■ Signal Output of  1.0 to 5.0 VDC.

■ Pressure measurement range is 1 Torr to 0.001 Torr 

■ Lower-cost

■ Linear Analog Output

Products

Dimensions

Specifications

History

 1997year

Founded  GAT Co.LTD

 1998year

Developed GMC100A Controller, GMC1000 Controller, Contracted about developed MFC  associated with ITEP

 1999year

Exported Contracted with France-Qualiflow OEM MFC controller Developed High Vacuum Ionization  Gauge Controller

 2000year

Developed Gas Flow Control Software

 2001year

Developed  MFC Controller(GMC200A), CM Controller(GPD-4), Pirani Gauge (CG201), Pirani Gauge Controller (CG2000)

 2003year

Developed GMC7100 & supply contracted with  LG PDP Line (A2), Developed MFC Controller (GMC300D)

 2004year

Developed Vacuum Gauge Controller(GVC2200)

 2005year

Developed MFC Controller (GMC1100),

Developed  GVC2200 & Supply  contracted with LG PDP Line(A3)

 2006year

Developed MFC Controller  GMC1200)

 2007year

Developed GAS Totalizer(GT1000), Voltage Meter( VM1000)

 2008year

Developed Throttle Valve(ATV1000), Valve Controller(GPC3000)

Change Company name to ATOVAC Co.LTD & Expanding

 2009year

Acquired CE for Throttle Valve, Developed Capacitance Manometer Gauge,  Throttle Valve(ATV2000), Mass Flow Controller(MFC)

 2010year

Supplied Capacitance Manometer , APC Controller & Valve to Samsung

Developed APC Valve for PoCl3 Process,  Acquired CE for APC Controller & MFC

 2012year

Developed Enhanced Convection Gauge(EG301)

 2013year

Acquired ISO9001 

Developed Mems Pressure Gauge(MPG)

Developed High Temperature Gauge(EG400)

 2014year

Acquired Explosion-proof certification for MPG

Office relocation(Yong In)

 2015year

Introduced CNC lathes and MFC (machining centers) and built their own processing lines.

Established an affiliated research institute.

 2016year

Renewal the EG301 & GPC3000 

Developed MFC for IGS TYPE(AFC500-IGS)

MPG2000 Mini Pressure Gague

MPG Series are part of the Atovac family of general purpose pressure gauge designed 

to provide accurate reliable, and repeatable Pressure measurements in the range 

from 1 Torr to 0.001 Torr.

 

Features & Benefits

■ Smaller, saving space

■ Signal Output of  1.0 to 5.0 VDC.

■ Pressure measurement range is 1 Torr to 0.001 Torr 

■ Lower-cost

■ Linear Analog Output

Products

Dimensions

Specifications (방)

Physical
방구조	Ex Na II T6 IP54
Input Power required	+24 VDC (15VDC 가능) 100 mA
Voltage Output current	10 mA
Overpressure Limit	10 bar (150 psi)
Accuracy	+/- 1.0 %
Resolution	0.001 m torr
직선성	Linear  Output 제공 ( 5.000 to 1.000 VDC , 1 mtorr 증가시 4mVolt 씩 증가)
사용 습도	0 ~ 100 %
사용 온도(온도에 따라 오차율)	0 ~ 50°C  (0-10 °C  이내 또는 40-50°C 이내 , 0.2 < % of Full Scale)
케이스 재질	SUS 304
절연저	35 MΩ / 500 Volt
가스 접부 재질	SUS 316L
용접방법	레이저 용접
Leak Rate	1 x 10-9 Torr 이 (He Leak detector 사용)